AS ISO 14644.3:2021 Cleanrooms and associated controlled environments Part 3: Test methods

AS ISO 14644.3:2021 Cleanrooms and associated controlled environments Part 3: Test methods. This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices. NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use. 2 Normative references There are no normative references in this document. 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. ISO and IEC maintain terminological databases for use in standardization at the following addresses: ISO Online browsing platform: available at https://www .org/obp IEC Electropedia: available at http://www.electropedia.org/ 3.1 General terms 3.1.1 cleanroom room within which the number concentration of airborne particles (3.2.1) is controlled and classified, and which is designed, constructed and operated in a manner to control the introduction, generation and retention of particles inside the room Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified. Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled. 3.3.3 dilution system system wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce concentration 3.3.4 filter system assembly composed of filter, frame and other support mechanism or other housing 3.3.5 final filter filter in...